Description

INTRODUCTION

Micro electromechanical systems (MEMS) are micrometer-scale devices that integrate electrical and mechanical elements.

They have been used in diverse applications, from display technologies to sensor systems to optical networks. MEMS are attractive for many applications because of their small size and weight, which allow systems to be miniaturized.

MEMS Seminar Report

Page Length : 20

Content :

• Introduction
• What Are MEMS?
• Application Of MEMS
• Components
• Manufacturing Process Of MEMS
• Silicon Micromachining Basic Techniques
• Thin Films
• Wet Etching
• Dry Etching
• Excimer Laser Micromachining
• Fabrication Process In MEMS
• Wet Etching
• Dry Etching
• Excimer Laser Micromachining
• Fabrication Process In MEMS
• Advanced Micro System Fabrication Technologies
• Precision Machining Technologies
• Emerging Silicon Micro Fabrication Technologies
• Advantages
• Disadvantages
• Conclusion
• References

MEMS Presentation Report (PPT)

Page Length : 24

Content :

• Introduction
• What Are MEMS?
• Application Of MEMS
• Components
• Manufacturing Process Of MEMS
• Silicon MicromachiningBasic Techniques
• Thin Films
• Wet Etching
• Dry Etching
• Excimer Laser Micromachining
• Fabrication Process In MEMS
• Wet Etching
• Dry Etching
• Excimer Laser Micromachining
• Fabrication Process In MEMS
• Advanced Micro System Fabrication Technologies
• Precision Machining Technologies
• Emering Silicon Micro Fabrication Technologies
• Advantages
• Disadvantages
• Conclusion
• References